Defect Classification by AFM-Based Nanomechanical Measurement from semiconductor nodes Watch Video
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⏲ Duration: 22 min 10 sec ✓ Published: 26-Sep-2014
Description: High Resolution, In Situ Materials Classification Enabled by PeakForce TappingnThis webinar will discuss our latest research to address fast, in-line characterization of defects, one of the most serious problems facing semiconductor process yield and control in-coming process nodes. The simultaneously obtained quantitative material characterization and invaluable topographical information only provided by AFM with PeakForce Tapping enable actionable data by which sources of defects may be rapidl
Play Video: (Note: The default playback of the video is HD VERSION. If your browser is buffering the video slowly, please play the REGULAR MP4 VERSION or Open The Video below for better experience. Thank you!)